Description
To the point
The Linseis HCS systems are mainly used to characterize semiconductor materials.
They can determine both the Hall constant and the specific resistance, as well as the charge carrier concentration and Hall mobilities of the samples derived from these.
The desktop base unit is available in different configurations, which can be equipped with different sample holders for different sample geometries and temperature requirements.
An optional low-temperature extension for the use of liquid nitrogen and a high-temperature version up to 800°C guarantee that all conceivable areas of application can be covered.
The built-in permanent and electromagnets provide fixed or variable magnetic fields of up to almost one Tesla.
The associated, comprehensive and Windows©-based software enables the uncomplicated recording of I-V and I-R curves as well as the measurement and evaluation of Hall mobility, electrical conductivity and charge carrier concentration.
The Linseis HCS systems can measure a wide variety of materials, including Si, SiGe, SiC, GaAs, InGaAs, InP, GaN (N type & P type) as well as metal layers, metal oxides and many more.
Measuring functions:
- Charge carrier density (layer [1/cm²]/solid material [1/cm³])
- Hall constant [cm³/C]
- Hall mobility [cm²/Vs]
- Sheet resistance [Ω]
- Specific resistance [Ωcm]
- Electrical conductivity[S/cm]
- Alpha (ratio of horizontal to vertical resistance)
- Magnetoresistance
- Seebeck coefficient (µV/K)
Device features:
- Gas-tight measuring chamber, which enables measurements under defined atmospheres or vacuum conditions
- Magnets with 120 mm diameter for highest field homogeneity and maximum accuracy (poles up to 50mm x 50mm are possible)
- Modular and upgradeable system design
- High-temperature version up to 600°C/873K
- LED lighting option (several wavelengths are possible)
- Optional lock-in amplifier for measurements with minimal noise
- Connection for the use of external measuring electronics
- Integrated software package for user-friendly operability
Unique features
Versatile measurement options: Determination of Hall constant, specific resistance,
Charge carrier concentration and Hall mobility.
Wide temperature range: measurements of low temperatures (LN2) up to 800°C possible.
Modular system design: Customizable
with different sample holders and temperature extensions.
High field homogeneity: 120 mm magnets for maximum accuracy.
Integrated software: User-friendly
operation and comprehensive data analysis.
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Specifications
Black on white
MODEL | HCS 1 |
|---|---|
| Temperature range: | From LN2 up to 600°C in various versions -160°C (controlled cooling) -196°C (cooling) |
| Magnet: | Two permanent magnets with +/- 0.7T Diameter of the rod 120 mm for maximum uniformity (+/- 1% over 50mm) |
| Power supply: | DC 1nA up to 125mA (8 decades / compliance +/- 12V) |
| Voltage measurement: | DC low noise / low deviation 1μV up to 2500mV, 4 decades gain, digital resolution: 300pV |
| Sensors/ sample geometry: | - from 5 x 5 mm2 to 12.5 x 12.5 mm2, maximum sample height 3 mm - from 17.5 x 17.5 mm2 up to 25 x 25 mm2, maximum sample height 5 mm - from 42.5 x 42.5 mm2 up to 50 x 50 mm2, maximum sample height 5 mm - High temperature plate, 10 x 10mm2, max. sample height 2mm |
| Resistance range: | 10-4 up to 107(Ωcm) |
| Carrier concentration: | 107 up to 1021cm-3 |
| Mobility range: | 0.1 to 107(cm2/volt sec) |
| Atmospheres: | Vacuum, inert, oxidizing, reducing |
| Temperature accuracy: | 0.05°C |
MODEL | HCS 10 |
|---|---|
| Temperature range: | From LN2 up to 600°C in various versions -160°C (controlled cooling) -196°C (quench cooling) |
| Magnet: | Electromagnet up to +/- 1 T variable DC field, pole diameter 76 mm, power supply 75A / 40V. Current reversing switch for bipolar measurement. Alternative AC option for an alternating magnetic field with ~1 T usable field, at a frequency of up to 0.1 Hz |
| Power supply: | DC 1nA up to 125mA (8 decades / compliance +/- 12V) AC 16 μA up to 20 mA and input impedance: >100 GigaOhm from 1 mHz to 100 kHz |
| Voltage measurement: | DC low noise / low deviation 1μV up to 2500mV, 4 decades gain, digital resolution: 300pV AC 20 nV up to 1V, variable integration times and gain |
| Sensors/ sample geometry: | - from 5 x 5 mm2 to 12.5 x 12.5 mm2, maximum sample height 3 mm - from 17.5 x 17.5 mm2 to 25 x 25 mm2, maximum sample height 5 mm - from 42.5 x 42.5 mm2 up to 50 x 50 mm2, maximum sample height 5 mm - High temperature plate, 10 x 10 mm2, maximum sample height 2 mm |
| Resistance range: | 10-4 up to 107(Ωcm) |
| Carrier concentration: | 107 up to 1021cm-3 |
| Mobility range: | 10-3 ~ 107cm2V-1s-1 |
| Atmospheres: | Vacuum, inert, oxidizing, reducing |
| Temperature accuracy: | 0.05°C |
MODEL | HCS 100 |
|---|---|
| Temperature range: | RT up to 500°C |
| Magnet: | Magnet up to 0.5 T (AC or DC field) Multisegment Halbach configuration, inner diameter: 40mm, height: 98mm |
| Power supply: | DC 1nA up to 125mA (8 decades / compliance +/- 12V) AC 16 μA up to 20 mA and input impedance: >100 GigaOhm from 1 mHz to 100 kHz |
| Voltage measurement: | DC low noise / low deviation 1μV up to 2500mV, 4 decades gain, digital resolution: 300pV AC 20 nV up to 1V, variable integration times and gain |
| Sensors/ sample geometry: | Up to 10 x 10 mm2, maximum sample height 2.5 mm |
| Resistance range: | 10-5 up to 107(Ωcm) |
| Carrier concentration: | 107 up to 1022cm-3 |
| Mobility range: | 1 ~ 107cm2V-1s-1 |
| Atmospheres: | Vacuum, inert, oxidizing, reducing |
| Temperature accuracy: | 0.05°C |
HCS 100 Halbach magnet (donut configuration)
HCS 1: Interchangeable sensors with an EPROM on them, for easy plug-and-play use.
Available accessories
- Various sample holders are available for measurements from LN2 up to 600°C.
- The sample holder handle closes the measuring chamber vacuum-tight.
- The measuring chamber is equipped with an inlet and outlet for gas so that measurements can be carried out under a controlled and changing atmosphere.
The magnet variants of the HCS
Electromagnetic option (HCS 10)
An electromagnet kit is available as an option for the permanent magnet.
The water-cooled electromagnet works in combination with a programmable power supply and a reversing switch.
The power supply can apply currents of up to 75 A, resulting in a variable magnetic field strength of up to +/-1 T.
Detailed view of the measuring body
Permament magnet option (HCS 1)
The HCS 1 is equipped with two magnetic circuits (neodymium), which are mounted on a movable carriage that can be optionally automated.
The system can be equipped with both a low-temperature and a high-temperature extension.
Halbach option (HCS 100)
The HCS 100 uses a magnet in Halbach configuration (permanent magnet in donut configuration) to apply either a DC or an AC magnetic field to the sample.
In combination with an alternating current supplied by a lock-in amplifier, this setup is a powerful tool for the investigation of challenging samples, as offsets and noise can be suppressed in most cases.
Software
Making values visible and comparable
All LINSEIS devices are PC-controlled, with the individual software modules running exclusively under Microsoft® Windows® operating systems.
The integrated software enables easy handling, temperature control, data acquisition and data evaluation.
General:
- NIST routine to find optimal measurement settings and obtain highly accurate results
- Extended connection test
- Possible integration of external electronics
- Optional database storage
- Optional integration of a lock-in amplifier
- Automatic sensor detection (EEPROM)
- Automatic evaluation
- Fully automatic cooling control
- HCS 10 Online access to customization data
Application
Application example: Antimony Thin Film (150 nm Sb)
Well informed
