Indium tin oxide (ITO) is a semiconductor that is transparent for visible light and therefore used in many application fields where optical transparent semiconductors are needed. Especially diodes, microelectronics on glass substrates or invisible antennas and sensors often contain or are made of ITOs.
The two diagrams show a full measurement of Hall coefficient, Mobility and Resistivity for two different ITO thin film samples (both 185 nm in thickness) from room temperature to 200°C. Both samples were prepared by sputter deposition. The green hall coefficient curve is more or less giving a constant value while mobility (orange) and resistivity increase by temperature.
